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The charging of the dielectric used for the actuation in microelectromechanical system (MEMS) devices is one of the major failure sources for switches based on this technology. For this reason, a better understanding of such an effect is vital to improve the reliability for both ground and space applications. In this paper, the expected response of MEMS switches to unipolar and bipolar dc actuation voltages has been measured and modeled. Two configurations of MEMS switches, namely, an Ohmic series and a shunt capacitive one designed for microwave applications, have been studied as a test vehicle for charging effects related to the dc actuation pads. The recorded data have been interpreted mainly through the Poole–Frenkel effect due to charge injection when a high voltage is applied to the dielectric layer. Metal-Insulator-Metal (MIM) structures have been also considered as a complementary information for …
AIP Publishing
Publication date: 
1 Jun 2009

Romolo Marcelli, George Papaioannu, Simone Catoni, Giorgio De Angelis, Andrea Lucibello, Emanuela Proietti, Benno Margesin, Flavio Giacomozzi, François Deborgies

Biblio References: 
Volume: 105 Issue: 11
Journal of Applied Physics