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Microelectromechanical systems (MEMS) are integrated microdevices or systems combining electrical and mechanical components that can sense, control, and actuate on the microscale and function individually or in arrays to generate effects on the macroscale. MEMS is one of the most promising areas in future computers and machinery, the next logical step in the silicon revolution. Fabricated using integrated circuit (IC)-compatible batch-processing technologies, the small size of MEMS opens a new line of exciting applications, including aerospace, automotive, biological, medical, fluidics, military, optics, and many other areas. We explore the potentialities of a high-resolution optical technique for characterizing MEMS microstructures. The method is based on the application of digital holography as a noncontact metrological tool for inspection and characterization of the microstructure surface morphology. The …
International Society for Optics and Photonics
Publication date: 
1 Jan 2005

Giuseppe Coppola, Mario Iodice, Andrea Finizio, Sergio M De Nicola, Giovanni Pierattini, Pietro Ferraro Jr, Carlo Magro, G Spoto

Biblio References: 
Volume: 4 Issue: 1 Pages: 013012
Journal of Micro/Nanolithography, MEMS, and MOEMS