This chapter describes the possibility to use Digital Holography as a tool to carry out a non-contact and non-destructive characterization and inspection of micro-electro-mechanical systems (MEMS). The technique allows to evaluate quantitatively, with high accuracy, different features of a typical MEMS: the profile; the deformations induced by external influences; the behavior when actuated under operation conditions. Digital holography provides two main advantages consisting in the possibilities to perform a …