An equivalent-circuit model for shunt-connected coplanar microelectromechanical system switches for high frequency applications

Data di pubblicazione: 15 Ott 2008

RivistaFonte dati: ARCHIVIO

In this paper, a circuit model to predict the microwave response of a shunt-connected capacitive microelectromechanical coplanar switch is proposed. The numerical values of the lumped elements composing the equivalent circuit are computed by means of a fully analytic approach. In particular, the contribution of resistive and inductive parasitic elements has been evaluated by using closed-form expressions. Configurations characterized by different technological solutions have been obtained and modeled. Simulations performed with the proposed approach correlate very well with actual measurements.

Editore
AIP Publishing
Fonte
Journal of Applied Physics
ID archivio
db0529c9c80a0fdd59b6f62c378a9d27
Riferimenti
Volume: 104 Issue: 8