Type:
Book
Description:
In this communication, a silicon-glass microfluidic chip for the realization of optical sensing components in lab-on-chip applications has been demonstrated. The technology of Anodic Bonding, of great importance for the integration of microfluidic functions, has been used for the fabrication of chemical microsensors. A cross injection valve has been integrated with the porous silicon optical transducer on the prefabricated glass wafer with microchannels, so ensuring sample injection into the stream of carrier gas. A pneumatic actuation has been used for the valve control.The porous silicon (PSi) is the optical transducer material. Due to its porous structure it has a very large specific surface area of the order of 200-500 m2 cm-3, so that an effective interaction with several substances is assured. The optical read out of the PSi layer has been realized by means of an external optical system. The obtained preliminary …
Publisher:
Publication date:
1 Jan 2008
Biblio References:
Pages: 227-231
Origin:
Sensors And Microsystems