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A 48-element monolithic matrix detector, designed for parallel fluorescence detection, has been fabricated in silicon and tested. The pixels are single photon avalanche diodes (SPADs) with 50 µm diameter, ordered in a 6× 8 array with 240 µm pitch. The photon detection efficiency is remarkably uniform over the array: it has a peak of 48% at 530 nm and it is higher than 30% over all the visible range. Low dark counting rate (DCR) is obtained in operation at moderately low temperature (−15°C with thermoelectric cooling): the individual pixel DCR is 60 c s−1 for about 40% of the elements and it is below 5700 c s−1 in the rest of the array. It was verified that the afterpulsing probability is below 1% and that the optical crosstalk probability between elements is lower than 0.2%. Based on this matrix detector, we have developed a versatile and compact (20 cm× 8 cm × 4 cm) photon counting module that can be …
Taylor & Francis Group
Publication date: 
20 Jan 2007

Alessandro Restelli, Ivan Rech, Piera Maccagnani, Massimo Ghioni, Sergio Cova

Biblio References: 
Volume: 54 Issue: 2-3 Pages: 213-223
Journal of Modern Optics