Phosphosilicate glass films produced by subatmospheric pressure chemical vapor deposition with different phosphorus concentrations have been investigated by ultraviolet Raman spectroscopy and electron paramagnetic resonance (EPR) spectroscopy. The behavior and the attribution of the main Raman band at 1326 (2) cm− 1 and the broad feature at about 1150 cm− 1 are discussed in detail. After room temperature x-ray irradiation, EPR spectra reveal resonance signals attributed to a stable and metastable variant of the phosphorous oxygen hole centers (POHC s and POHC m respectively). Density functional theory calculations have been performed to determine the structure, charge and spin distribution, hyperfine coupling constants, and g values of POHC s and POHC m and the structural and vibrational properties of their diamagnetic precursors. The comparison between the experimental data and the …