Type:
Conference
Description:
Aim of this work is the evaluation of a batch production fabrication run of a cheap sol-gel Pt-doped TiO2 thin film sensor on silicon substrate. The sensor is implemented as microsensors for lambda factor detection, while a preliminary investigation on real operative conditions shows that these devices perform a response time (t 90) in real condition around 1 second at 600 degC. Experimental tests in comparison with a commercial lambda probe were carried out
Publisher:
IEEE
Publication date:
1 Jan 2005
Biblio References:
Pages: 1192-1195
Origin:
SENSORS, 2005 IEEE