ION IMPLANTATION PROCESSES
| PROCESS | IMPLANTED SPECIES | ENERGY RANGE | TEMPERATURE |
| MEDIUM ENERGY | B, N, O, Si, P, Ar, As, In, Sb | 15-170 keV | R.T. - 550°C |
| HIGH ENERGY | H, He, B, N, O, Al, Si, P, As | 500 KeV - 5 MeV | -60 - 700 °C |
CONTACT PERSON: FULVIO MANCARELLA
Brochure IMM
