Authors: 

Massimo Zimbone, Marco Mauceri, Grazia Litrico, Eric Gasparo Barbagiovanni, Corrado Bongiorno, Francesco La Via

The research aims to the development of MEMS using thin piezoelectric film deposited by sputtering process.

Authors: 

S Dinarelli, G Longo, S Krumova, S Todinova, A Danailova, SG Taneva, E Lenzi, V Mussi, M Girasole

Authors: 

Nicolò Piluso, Andrea Severino, Ruggero Anzalone, Maria Ausilia di Stefano, Enzo Fontana, Marco Salanitri, Simona Lorenti, Alberto Campione, Patrick Fiorenza, Francesco La Via

Authors: 

Grazia Litrico, Ruggero Anzalone, Alessandra Alberti, Corrado Bongiorno, Giuseppe Nicotra, Massimo Zimbone, Marco Mauceri, Salvo Coffa, Francesco La Via

Authors: 

Patrick Fiorenza, Marilena Vivona, Ferdinando Iucolano, Andrea Severino, Simona Lorenti, Fabrizio Roccaforte

Authors: 

Francesco La Via, Fabrizio Roccaforte, Antonino La Magna, Roberta Nipoti, Fulvio Mancarella, Peter J Wellmann, Danilo Crippa, Marco Mauceri, Peter Ward, Leo Miglio, Marcin Zielinski, Adolf Schöner, Ahmed Nejim, Laura Vivani, Rositza Yakimova, Mikael Syväjärvi, Gregory Grosset, Frank Torregrosa, Michael Jennings, Philip A Mawby, Ruggero Anzalone, Salvo Coffa, Hiroyuki Nagasawa

Authors: 

Roberta Nipoti, Alberto Carnera, Giovanni Alfieri, Lukas Kranz

Authors: 
Authors: 

Benedetto Bozzini, Matteo Amati, Tsvetina Dobrovolska, Luca Gregoratti, Ivan Krastev, Ivonne Sgura, Antonietta Taurino, Maya Kiskinova

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