Mechanical proprieties and residual stress evaluation on heteroepitaxial 3C-SiC/Si for MEMS application

Authors: 

Ruggero Anzalone, Giuseppe D'Arrigo, Massimo Camarda, Nicolò Piluso, Andrea Severino, Francesco La Via

Evaluation of the excess and clustered silicon profiles in a silicon implanted SiO 2 layer

Authors: 

G Nicotra, G Franzo, C Spinella

Atomic layer deposition of ZnO/TiO 2 multilayers: towards the understanding of Ti-doping in ZnO thin films

Authors: 

G Torrisi, A Di Mauro, M Scuderi, G Nicotra, G Impellizzeri

Multiple gate NVM cells with improved Fowler–Nordheim tunneling program and erase performances

Authors: 

C Gerardi, E Tripiciano, G Cinà, S Lombardo, C Garozzo, D Corso, G Betrò, C Pace, F Crupi

Defect Reduction in Epitaxial 3C-SiC on Si (001) and Si (111) by Deep Substrate Patterning

Authors: 

Hans von Känel, Leo Miglio, Danilo Crippa, Thomas Kreiliger, Marco Mauceri, Marco Puglisi, Fulvio Mancarella, Ruggero Anzalone, Nicolo’ Piluso, Francesco La Via

Miniaturizable Si-based electro-optical modulator working at 1.5 μm

Authors: 

Antonella Sciuto, Sebania Libertino, Salvo Coffa, Giuseppe Coppola

A Nanoscale Look in the Channel of 4H-SiC Lateral MOSFETs

Authors: 

Patrick Fiorenza, Alessia Frazzetto, Lukas K Swanson, Filippo Giannazzo, Fabrizio Roccaforte

A three-dimensional phase-field simulation of pulsed laser induced epitaxial growth of silicon

Authors: 

MOHAMMAD REZA TAJARI MOFRAD, ANTONIO LA MAGNA, RYOICHI ISHIHARA, HE MING, KEES BEENAKKER

3C-SiC film growth on Si substrates

Authors: 

Andrea Severino, Christopher Locke, Ruggero Anzalone, Massimo Camarda, Nicolò Piluso, Antonino La Magna, Stephen Saddow, Giuseppe Abbondanza, Giuseppe D'Arrigo, Francesco La Via

4H-SiC Schottky array photodiodes for UV imaging application based on the pinch-off surface effect

Authors: 

Antonella Sciuto, Fabrizio Roccaforte, Salvatore di Franco, Vito Raineri, Salvatore F Liotta, Sergio Billotta, Giovanni Bonanno, Massimiliano Belluso

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