MA Reading, JA Van den Berg, PC Zalm, DG Armour, Paul Bailey, TCQ Noakes, A Parisini, T Conard, Stefan De Gendt
Biblio references: Volume: 28 Issue: 1 Pages: C1C65-C1C70
Origin: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena