Isabella Rossetto, Rossella Piagge, Fabrizio Toia, Sabina Spiga, Alessio Lamperti, Silvia Vangelista, Riina Ritasalo, Päivi Järvinen, Gabriella Ghidini
Biblio references: Volume: 37 Issue: 2 Pages: 021205
Origin: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena