F Jabeen, M Piccin, L Felisari, V Grillo, G Bais, S Rubini, F Martelli, F d’Acapito, M Rovezzi, F Boscherini
 
			  
             
			
				Biblio references: Volume: 28  Issue: 3  Pages: 478-483   
				Origin: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena