G Impellizzeri, S Mirabella, E Bruno, F Priolo, E Napolitani, A Carnera
Biblio references: Volume: 24 Issue: 1 Pages: 433-436
Origin: Journal of Vacuum Science and Technology-Section B
Umberto Amato, Anestis Antoniadis, Marianna Pensky
Biblio references: Volume: 16 Issue: 1 Pages: 37-55
Origin: Statistics and Computing
Agostino Pirovano, Luca Perniola, Hiroshi Mizuta, Heike Riel, Damien Deleruyelle, Rainer Waser, Sidhu Maikap, Grazia Tallarida, Claudia Wiemer, Daniele Ielmini
Biblio references: Volume: 274 Issue: 5
Origin: IEDM Short Course
Enrico Napolitani, Andrej Kuznetsov, Wolfgang Skorupa, Majeed Foad
Biblio references: Volume: 253 Issue: 1-2
Origin: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
A Lorusso, F Belloni, D Doria, V Nassisi, L Velardi
Biblio references: Volume: 30 Issue: G Pages: 95
Origin: EUROPHYSICS CONFERENCE ABSTRACTS ECA
S Heun, G Biasiol, GB Golinelli, V Grillo, E Carlino, L Sorba, F Ratto, F Rosei, S Kharrazi, S Ashtaputre, SK Kulkarni, S Fontana, A Locatelli, TO Mentes, FZ Guo
Biblio references: Volume: 2 Pages: 401
Origin: Small
E Napolitani, D De Salvador, M Pesce, A Carnera, S Mirabella, F Priolo
Biblio references: Volume: 24 Issue: 1 Pages: 394-398
G Garozzo, C Bellecci, C Savardi, AL Magna
Biblio references: Volume: 6 Pages: 81
Origin: PROCEEDINGS OF INTERNATIONAL SYMPOSIUM ON DRY PROCESS
G Impellizzeri, S Mirabella, L Romano, E Napolitani, A Carnera, MG Grimaldi, F Priolo
Biblio references: Volume: 242 Issue: 1-2 Pages: 614-616
Rg Toro, G Malandrino, Il Fragala, V Raineri, P Fiorenza
Biblio references: Volume: 9 Issue: 6 Pages: 1073-1078
Origin: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
