F Jabeen, M Piccin, L Felisari, V Grillo, G Bais, S Rubini, F Martelli, F d’Acapito, M Rovezzi, F Boscherini
Biblio references: Volume: 28 Issue: 3 Pages: 478-483
Origin: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena